5/14/2010	9:32:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	9:32:11 AM	Recipe started at 9:32 AM
5/14/2010	9:32:11 AM	H2 valve closed
5/14/2010	9:32:11 AM	BCl3 valve closed
5/14/2010	9:32:11 AM	PH3 valve closed
5/14/2010	9:32:11 AM	SiCl4 pre valve closed
5/14/2010	9:32:11 AM	SiCl4 post valve closed
5/14/2010	9:32:11 AM	Main Vac valve closed
5/14/2010	9:32:11 AM	Bypass valve closed
5/14/2010	9:32:11 AM	Bubbler valve closed
5/14/2010	9:32:11 AM	Helium valve opened
5/14/2010	9:32:11 AM	Helium MFC set to  500.000000
5/14/2010	9:32:11 AM	H2 MFC set to  0.000000
5/14/2010	9:32:11 AM	BCl3 MFC set to  0.000000
5/14/2010	9:32:11 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:32:11 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:32:11 AM	Tube furnace set to 0
5/14/2010	9:33:29 AM	Helium valve closed
5/14/2010	9:33:29 AM	H2 valve closed
5/14/2010	9:33:29 AM	BCl3 valve closed
5/14/2010	9:33:29 AM	PH3 valve closed
5/14/2010	9:33:29 AM	SiCl4 pre valve closed
5/14/2010	9:33:29 AM	SiCl4 post valve closed
5/14/2010	9:33:29 AM	Main Vac valve closed
5/14/2010	9:33:29 AM	Bypass valve closed
5/14/2010	9:33:29 AM	Bubbler valve closed
5/14/2010	9:33:29 AM	Helium MFC set to  0.000000
5/14/2010	9:33:29 AM	H2 MFC set to  0.000000
5/14/2010	9:33:29 AM	BCl3 MFC set to  0.000000
5/14/2010	9:33:29 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:33:29 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:33:29 AM	Tube furnace set to 0
5/14/2010	9:33:29 AM	Run finished at 9:33 AM
5/14/2010	9:33:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	9:37:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/14/2010	9:37:06 AM	Recipe started at 9:37 AM
5/14/2010	9:37:06 AM	H2 valve closed
5/14/2010	9:37:06 AM	BCl3 valve closed
5/14/2010	9:37:06 AM	PH3 valve closed
5/14/2010	9:37:06 AM	SiCl4 pre valve closed
5/14/2010	9:37:06 AM	SiCl4 post valve closed
5/14/2010	9:37:06 AM	Main Vac valve closed
5/14/2010	9:37:06 AM	Bypass valve closed
5/14/2010	9:37:06 AM	Bubbler valve closed
5/14/2010	9:37:06 AM	Helium valve opened
5/14/2010	9:37:06 AM	Helium MFC set to  500.000000
5/14/2010	9:37:06 AM	H2 MFC set to  0.000000
5/14/2010	9:37:06 AM	BCl3 MFC set to  0.000000
5/14/2010	9:37:06 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:37:06 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:37:06 AM	Tube furnace set to 0
5/14/2010	9:37:08 AM	Helium valve closed
5/14/2010	9:37:08 AM	H2 valve closed
5/14/2010	9:37:08 AM	BCl3 valve closed
5/14/2010	9:37:08 AM	PH3 valve closed
5/14/2010	9:37:08 AM	SiCl4 pre valve closed
5/14/2010	9:37:08 AM	SiCl4 post valve closed
5/14/2010	9:37:08 AM	Main Vac valve closed
5/14/2010	9:37:08 AM	Bypass valve closed
5/14/2010	9:37:08 AM	Bubbler valve closed
5/14/2010	9:37:08 AM	Helium MFC set to  0.000000
5/14/2010	9:37:08 AM	H2 MFC set to  0.000000
5/14/2010	9:37:08 AM	BCl3 MFC set to  0.000000
5/14/2010	9:37:08 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:37:08 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:37:08 AM	Tube furnace set to 0
5/14/2010	9:37:23 AM	Helium valve closed
5/14/2010	9:37:23 AM	H2 valve closed
5/14/2010	9:37:23 AM	BCl3 valve closed
5/14/2010	9:37:23 AM	PH3 valve closed
5/14/2010	9:37:23 AM	SiCl4 pre valve closed
5/14/2010	9:37:23 AM	SiCl4 post valve closed
5/14/2010	9:37:23 AM	Main Vac valve closed
5/14/2010	9:37:23 AM	Bubbler valve closed
5/14/2010	9:37:23 AM	Bypass valve opened
5/14/2010	9:37:23 AM	Helium MFC set to  0.000000
5/14/2010	9:37:23 AM	H2 MFC set to  0.000000
5/14/2010	9:37:23 AM	BCl3 MFC set to  0.000000
5/14/2010	9:37:23 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:37:23 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:37:23 AM	Tube furnace set to 0
5/14/2010	9:38:08 AM	Helium valve closed
5/14/2010	9:38:08 AM	H2 valve closed
5/14/2010	9:38:08 AM	BCl3 valve closed
5/14/2010	9:38:08 AM	PH3 valve closed
5/14/2010	9:38:08 AM	SiCl4 pre valve closed
5/14/2010	9:38:08 AM	SiCl4 post valve closed
5/14/2010	9:38:08 AM	Bubbler valve closed
5/14/2010	9:38:08 AM	Main Vac valve opened
5/14/2010	9:38:08 AM	Bypass valve opened
5/14/2010	9:38:08 AM	Helium MFC set to  0.000000
5/14/2010	9:38:08 AM	H2 MFC set to  0.000000
5/14/2010	9:38:08 AM	BCl3 MFC set to  0.000000
5/14/2010	9:38:08 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:38:08 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:38:08 AM	Tube furnace set to 0
5/14/2010	9:43:08 AM	H2 valve closed
5/14/2010	9:43:08 AM	BCl3 valve closed
5/14/2010	9:43:08 AM	PH3 valve closed
5/14/2010	9:43:08 AM	SiCl4 pre valve closed
5/14/2010	9:43:08 AM	SiCl4 post valve closed
5/14/2010	9:43:08 AM	Main Vac valve closed
5/14/2010	9:43:08 AM	Bypass valve closed
5/14/2010	9:43:08 AM	Bubbler valve closed
5/14/2010	9:43:08 AM	Helium valve opened
5/14/2010	9:43:08 AM	Helium MFC set to  500.000000
5/14/2010	9:43:08 AM	H2 MFC set to  0.000000
5/14/2010	9:43:08 AM	BCl3 MFC set to  0.000000
5/14/2010	9:43:08 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:43:08 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:43:08 AM	Tube furnace set to 0
5/14/2010	9:44:31 AM	Helium valve closed
5/14/2010	9:44:31 AM	H2 valve closed
5/14/2010	9:44:31 AM	BCl3 valve closed
5/14/2010	9:44:31 AM	PH3 valve closed
5/14/2010	9:44:31 AM	SiCl4 pre valve closed
5/14/2010	9:44:31 AM	SiCl4 post valve closed
5/14/2010	9:44:31 AM	Main Vac valve closed
5/14/2010	9:44:31 AM	Bypass valve closed
5/14/2010	9:44:31 AM	Bubbler valve closed
5/14/2010	9:44:31 AM	Helium MFC set to  0.000000
5/14/2010	9:44:31 AM	H2 MFC set to  0.000000
5/14/2010	9:44:31 AM	BCl3 MFC set to  0.000000
5/14/2010	9:44:31 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:44:31 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:44:31 AM	Tube furnace set to 0
5/14/2010	9:44:46 AM	Helium valve closed
5/14/2010	9:44:46 AM	H2 valve closed
5/14/2010	9:44:46 AM	BCl3 valve closed
5/14/2010	9:44:46 AM	PH3 valve closed
5/14/2010	9:44:46 AM	SiCl4 pre valve closed
5/14/2010	9:44:46 AM	SiCl4 post valve closed
5/14/2010	9:44:46 AM	Main Vac valve closed
5/14/2010	9:44:46 AM	Bubbler valve closed
5/14/2010	9:44:46 AM	Bypass valve opened
5/14/2010	9:44:46 AM	Helium MFC set to  0.000000
5/14/2010	9:44:46 AM	H2 MFC set to  0.000000
5/14/2010	9:44:46 AM	BCl3 MFC set to  0.000000
5/14/2010	9:44:46 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:44:46 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:44:47 AM	Tube furnace set to 0
5/14/2010	9:45:19 AM	Helium valve closed
5/14/2010	9:45:19 AM	H2 valve closed
5/14/2010	9:45:19 AM	BCl3 valve closed
5/14/2010	9:45:19 AM	PH3 valve closed
5/14/2010	9:45:19 AM	SiCl4 pre valve closed
5/14/2010	9:45:19 AM	SiCl4 post valve closed
5/14/2010	9:45:19 AM	Bubbler valve closed
5/14/2010	9:45:19 AM	Main Vac valve opened
5/14/2010	9:45:19 AM	Bypass valve opened
5/14/2010	9:45:19 AM	Helium MFC set to  0.000000
5/14/2010	9:45:19 AM	H2 MFC set to  0.000000
5/14/2010	9:45:19 AM	BCl3 MFC set to  0.000000
5/14/2010	9:45:19 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:45:19 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:45:19 AM	Tube furnace set to 0
5/14/2010	9:50:19 AM	H2 valve closed
5/14/2010	9:50:19 AM	BCl3 valve closed
5/14/2010	9:50:19 AM	PH3 valve closed
5/14/2010	9:50:19 AM	SiCl4 pre valve closed
5/14/2010	9:50:19 AM	SiCl4 post valve closed
5/14/2010	9:50:19 AM	Main Vac valve closed
5/14/2010	9:50:19 AM	Bypass valve closed
5/14/2010	9:50:19 AM	Bubbler valve closed
5/14/2010	9:50:19 AM	Helium valve opened
5/14/2010	9:50:19 AM	Helium MFC set to  500.000000
5/14/2010	9:50:19 AM	H2 MFC set to  0.000000
5/14/2010	9:50:19 AM	BCl3 MFC set to  0.000000
5/14/2010	9:50:19 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:50:19 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:50:19 AM	Tube furnace set to 0
5/14/2010	9:51:42 AM	Helium valve closed
5/14/2010	9:51:42 AM	H2 valve closed
5/14/2010	9:51:42 AM	BCl3 valve closed
5/14/2010	9:51:42 AM	PH3 valve closed
5/14/2010	9:51:42 AM	SiCl4 pre valve closed
5/14/2010	9:51:42 AM	SiCl4 post valve closed
5/14/2010	9:51:42 AM	Main Vac valve closed
5/14/2010	9:51:42 AM	Bypass valve closed
5/14/2010	9:51:42 AM	Bubbler valve closed
5/14/2010	9:51:42 AM	Helium MFC set to  0.000000
5/14/2010	9:51:42 AM	H2 MFC set to  0.000000
5/14/2010	9:51:42 AM	BCl3 MFC set to  0.000000
5/14/2010	9:51:42 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:51:42 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:51:42 AM	Tube furnace set to 0
5/14/2010	9:51:57 AM	Helium valve closed
5/14/2010	9:51:57 AM	H2 valve closed
5/14/2010	9:51:57 AM	BCl3 valve closed
5/14/2010	9:51:57 AM	PH3 valve closed
5/14/2010	9:51:57 AM	SiCl4 pre valve closed
5/14/2010	9:51:57 AM	SiCl4 post valve closed
5/14/2010	9:51:57 AM	Main Vac valve closed
5/14/2010	9:51:57 AM	Bubbler valve closed
5/14/2010	9:51:57 AM	Bypass valve opened
5/14/2010	9:51:57 AM	Helium MFC set to  0.000000
5/14/2010	9:51:57 AM	H2 MFC set to  0.000000
5/14/2010	9:51:57 AM	BCl3 MFC set to  0.000000
5/14/2010	9:51:57 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:51:57 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:51:58 AM	Tube furnace set to 0
5/14/2010	9:52:30 AM	Helium valve closed
5/14/2010	9:52:30 AM	H2 valve closed
5/14/2010	9:52:30 AM	BCl3 valve closed
5/14/2010	9:52:30 AM	PH3 valve closed
5/14/2010	9:52:30 AM	SiCl4 pre valve closed
5/14/2010	9:52:30 AM	SiCl4 post valve closed
5/14/2010	9:52:30 AM	Bubbler valve closed
5/14/2010	9:52:30 AM	Main Vac valve opened
5/14/2010	9:52:30 AM	Bypass valve opened
5/14/2010	9:52:30 AM	Helium MFC set to  0.000000
5/14/2010	9:52:30 AM	H2 MFC set to  0.000000
5/14/2010	9:52:30 AM	BCl3 MFC set to  0.000000
5/14/2010	9:52:30 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:52:30 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:52:30 AM	Tube furnace set to 0
5/14/2010	9:57:30 AM	Helium valve closed
5/14/2010	9:57:30 AM	H2 valve closed
5/14/2010	9:57:30 AM	BCl3 valve closed
5/14/2010	9:57:30 AM	PH3 valve closed
5/14/2010	9:57:30 AM	SiCl4 pre valve closed
5/14/2010	9:57:30 AM	SiCl4 post valve closed
5/14/2010	9:57:30 AM	Bubbler valve closed
5/14/2010	9:57:30 AM	Main Vac valve opened
5/14/2010	9:57:30 AM	Bypass valve opened
5/14/2010	9:57:30 AM	Helium MFC set to  0.000000
5/14/2010	9:57:30 AM	H2 MFC set to  0.000000
5/14/2010	9:57:30 AM	BCl3 MFC set to  0.000000
5/14/2010	9:57:30 AM	SiCl4 MFC set to  0.000000
5/14/2010	9:57:30 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	9:57:30 AM	Tube furnace set to 0
5/14/2010	9:57:31 AM	Run finished at 9:57 AM
5/14/2010	9:57:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/14/2010	10:36:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	10:36:26 AM	Recipe started at 10:36 AM
5/14/2010	10:36:26 AM	H2 valve closed
5/14/2010	10:36:26 AM	BCl3 valve closed
5/14/2010	10:36:26 AM	PH3 valve closed
5/14/2010	10:36:26 AM	SiCl4 pre valve closed
5/14/2010	10:36:26 AM	SiCl4 post valve closed
5/14/2010	10:36:26 AM	Main Vac valve closed
5/14/2010	10:36:26 AM	Bypass valve closed
5/14/2010	10:36:26 AM	Bubbler valve closed
5/14/2010	10:36:26 AM	Helium valve opened
5/14/2010	10:36:26 AM	Helium MFC set to  500.000000
5/14/2010	10:36:26 AM	H2 MFC set to  0.000000
5/14/2010	10:36:26 AM	BCl3 MFC set to  0.000000
5/14/2010	10:36:26 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:36:26 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:36:27 AM	Tube furnace set to 0
5/14/2010	10:36:51 AM	Helium valve closed
5/14/2010	10:36:51 AM	H2 valve closed
5/14/2010	10:36:51 AM	BCl3 valve closed
5/14/2010	10:36:51 AM	PH3 valve closed
5/14/2010	10:36:51 AM	SiCl4 pre valve closed
5/14/2010	10:36:51 AM	SiCl4 post valve closed
5/14/2010	10:36:51 AM	Main Vac valve closed
5/14/2010	10:36:51 AM	Bypass valve closed
5/14/2010	10:36:51 AM	Bubbler valve closed
5/14/2010	10:36:51 AM	Helium MFC set to  0.000000
5/14/2010	10:36:51 AM	H2 MFC set to  0.000000
5/14/2010	10:36:51 AM	BCl3 MFC set to  0.000000
5/14/2010	10:36:51 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:36:51 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:36:51 AM	Tube furnace set to 0
5/14/2010	10:36:51 AM	Run finished at 10:36 AM
5/14/2010	10:36:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	10:36:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2010	10:36:53 AM	Recipe started at 10:36 AM
5/14/2010	10:36:53 AM	Helium valve closed
5/14/2010	10:36:53 AM	H2 valve closed
5/14/2010	10:36:53 AM	BCl3 valve closed
5/14/2010	10:36:53 AM	PH3 valve closed
5/14/2010	10:36:53 AM	SiCl4 pre valve closed
5/14/2010	10:36:53 AM	SiCl4 post valve closed
5/14/2010	10:36:53 AM	Main Vac valve closed
5/14/2010	10:36:53 AM	Bubbler valve closed
5/14/2010	10:36:54 AM	Bypass valve opened
5/14/2010	10:36:54 AM	Helium MFC set to  0.000000
5/14/2010	10:36:54 AM	H2 MFC set to  0.000000
5/14/2010	10:36:54 AM	BCl3 MFC set to  0.000000
5/14/2010	10:36:54 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:36:54 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:36:54 AM	Tube furnace set to 0
5/14/2010	10:37:16 AM	Helium valve closed
5/14/2010	10:37:16 AM	H2 valve closed
5/14/2010	10:37:16 AM	BCl3 valve closed
5/14/2010	10:37:16 AM	PH3 valve closed
5/14/2010	10:37:16 AM	SiCl4 pre valve closed
5/14/2010	10:37:16 AM	SiCl4 post valve closed
5/14/2010	10:37:16 AM	Bubbler valve closed
5/14/2010	10:37:16 AM	Main Vac valve opened
5/14/2010	10:37:16 AM	Bypass valve opened
5/14/2010	10:37:16 AM	Helium MFC set to  0.000000
5/14/2010	10:37:16 AM	H2 MFC set to  0.000000
5/14/2010	10:37:16 AM	BCl3 MFC set to  0.000000
5/14/2010	10:37:16 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:37:16 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:37:16 AM	Tube furnace set to 0
5/14/2010	10:37:16 AM	Run finished at 10:37 AM
5/14/2010	10:37:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2010	10:39:04 AM	Main Vac valve closed
5/14/2010	10:39:05 AM	Bypass valve closed
5/14/2010	10:39:15 AM	Bypass valve opened
5/14/2010	10:39:15 AM	Main Vac valve opened
5/14/2010	10:40:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	10:40:46 AM	Recipe started at 10:40 AM
5/14/2010	10:40:46 AM	H2 valve closed
5/14/2010	10:40:46 AM	BCl3 valve closed
5/14/2010	10:40:46 AM	PH3 valve closed
5/14/2010	10:40:46 AM	SiCl4 pre valve closed
5/14/2010	10:40:46 AM	SiCl4 post valve closed
5/14/2010	10:40:46 AM	Main Vac valve closed
5/14/2010	10:40:46 AM	Bypass valve closed
5/14/2010	10:40:46 AM	Bubbler valve closed
5/14/2010	10:40:46 AM	Helium valve opened
5/14/2010	10:40:46 AM	Helium MFC set to  500.000000
5/14/2010	10:40:46 AM	H2 MFC set to  0.000000
5/14/2010	10:40:46 AM	BCl3 MFC set to  0.000000
5/14/2010	10:40:46 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:40:46 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:40:46 AM	Tube furnace set to 0
5/14/2010	10:42:07 AM	Helium valve closed
5/14/2010	10:42:07 AM	H2 valve closed
5/14/2010	10:42:07 AM	BCl3 valve closed
5/14/2010	10:42:07 AM	PH3 valve closed
5/14/2010	10:42:07 AM	SiCl4 pre valve closed
5/14/2010	10:42:07 AM	SiCl4 post valve closed
5/14/2010	10:42:07 AM	Main Vac valve closed
5/14/2010	10:42:07 AM	Bypass valve closed
5/14/2010	10:42:07 AM	Bubbler valve closed
5/14/2010	10:42:07 AM	Helium MFC set to  0.000000
5/14/2010	10:42:07 AM	H2 MFC set to  0.000000
5/14/2010	10:42:07 AM	BCl3 MFC set to  0.000000
5/14/2010	10:42:07 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:42:07 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:42:07 AM	Tube furnace set to 0
5/14/2010	10:42:07 AM	Run finished at 10:42 AM
5/14/2010	10:42:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	10:44:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2010	10:44:09 AM	Recipe started at 10:44 AM
5/14/2010	10:44:09 AM	Helium valve closed
5/14/2010	10:44:09 AM	H2 valve closed
5/14/2010	10:44:09 AM	BCl3 valve closed
5/14/2010	10:44:09 AM	PH3 valve closed
5/14/2010	10:44:09 AM	SiCl4 pre valve closed
5/14/2010	10:44:09 AM	SiCl4 post valve closed
5/14/2010	10:44:09 AM	Main Vac valve closed
5/14/2010	10:44:09 AM	Bubbler valve closed
5/14/2010	10:44:09 AM	Bypass valve opened
5/14/2010	10:44:09 AM	Helium MFC set to  0.000000
5/14/2010	10:44:09 AM	H2 MFC set to  0.000000
5/14/2010	10:44:09 AM	BCl3 MFC set to  0.000000
5/14/2010	10:44:09 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:44:09 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:44:10 AM	Tube furnace set to 0
5/14/2010	10:45:32 AM	Helium valve closed
5/14/2010	10:45:32 AM	H2 valve closed
5/14/2010	10:45:32 AM	BCl3 valve closed
5/14/2010	10:45:32 AM	PH3 valve closed
5/14/2010	10:45:32 AM	SiCl4 pre valve closed
5/14/2010	10:45:32 AM	SiCl4 post valve closed
5/14/2010	10:45:32 AM	Bubbler valve closed
5/14/2010	10:45:32 AM	Main Vac valve opened
5/14/2010	10:45:32 AM	Bypass valve opened
5/14/2010	10:45:32 AM	Helium MFC set to  0.000000
5/14/2010	10:45:32 AM	H2 MFC set to  0.000000
5/14/2010	10:45:32 AM	BCl3 MFC set to  0.000000
5/14/2010	10:45:32 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:45:32 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:45:32 AM	Tube furnace set to 0
5/14/2010	10:45:32 AM	Run finished at 10:45 AM
5/14/2010	10:45:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2010	10:46:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	10:46:01 AM	Recipe started at 10:46 AM
5/14/2010	10:46:01 AM	H2 valve closed
5/14/2010	10:46:01 AM	BCl3 valve closed
5/14/2010	10:46:01 AM	PH3 valve closed
5/14/2010	10:46:01 AM	SiCl4 pre valve closed
5/14/2010	10:46:01 AM	SiCl4 post valve closed
5/14/2010	10:46:01 AM	Main Vac valve closed
5/14/2010	10:46:01 AM	Bypass valve closed
5/14/2010	10:46:01 AM	Bubbler valve closed
5/14/2010	10:46:01 AM	Helium valve opened
5/14/2010	10:46:01 AM	Helium MFC set to  500.000000
5/14/2010	10:46:01 AM	H2 MFC set to  0.000000
5/14/2010	10:46:01 AM	BCl3 MFC set to  0.000000
5/14/2010	10:46:01 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:46:01 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:46:01 AM	Tube furnace set to 0
5/14/2010	10:47:21 AM	Helium valve closed
5/14/2010	10:47:21 AM	H2 valve closed
5/14/2010	10:47:21 AM	BCl3 valve closed
5/14/2010	10:47:22 AM	PH3 valve closed
5/14/2010	10:47:22 AM	SiCl4 pre valve closed
5/14/2010	10:47:22 AM	SiCl4 post valve closed
5/14/2010	10:47:22 AM	Main Vac valve closed
5/14/2010	10:47:22 AM	Bypass valve closed
5/14/2010	10:47:22 AM	Bubbler valve closed
5/14/2010	10:47:22 AM	Helium MFC set to  0.000000
5/14/2010	10:47:22 AM	H2 MFC set to  0.000000
5/14/2010	10:47:22 AM	BCl3 MFC set to  0.000000
5/14/2010	10:47:22 AM	SiCl4 MFC set to  0.000000
5/14/2010	10:47:22 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	10:47:22 AM	Tube furnace set to 0
5/14/2010	10:47:22 AM	Run finished at 10:47 AM
5/14/2010	10:47:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	11:00:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2010	11:00:30 AM	Recipe started at 11:00 AM
5/14/2010	11:00:30 AM	Helium valve closed
5/14/2010	11:00:30 AM	H2 valve closed
5/14/2010	11:00:30 AM	BCl3 valve closed
5/14/2010	11:00:30 AM	PH3 valve closed
5/14/2010	11:00:30 AM	SiCl4 pre valve closed
5/14/2010	11:00:30 AM	SiCl4 post valve closed
5/14/2010	11:00:30 AM	Main Vac valve closed
5/14/2010	11:00:30 AM	Bubbler valve closed
5/14/2010	11:00:30 AM	Bypass valve opened
5/14/2010	11:00:30 AM	Helium MFC set to  0.000000
5/14/2010	11:00:30 AM	H2 MFC set to  0.000000
5/14/2010	11:00:30 AM	BCl3 MFC set to  0.000000
5/14/2010	11:00:30 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:00:30 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:00:30 AM	Tube furnace set to 0
5/14/2010	11:01:03 AM	Helium valve closed
5/14/2010	11:01:03 AM	H2 valve closed
5/14/2010	11:01:03 AM	BCl3 valve closed
5/14/2010	11:01:03 AM	PH3 valve closed
5/14/2010	11:01:03 AM	SiCl4 pre valve closed
5/14/2010	11:01:03 AM	SiCl4 post valve closed
5/14/2010	11:01:03 AM	Bubbler valve closed
5/14/2010	11:01:03 AM	Main Vac valve opened
5/14/2010	11:01:03 AM	Bypass valve opened
5/14/2010	11:01:03 AM	Helium MFC set to  0.000000
5/14/2010	11:01:03 AM	H2 MFC set to  0.000000
5/14/2010	11:01:03 AM	BCl3 MFC set to  0.000000
5/14/2010	11:01:03 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:01:03 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:01:03 AM	Tube furnace set to 0
5/14/2010	11:01:03 AM	Run finished at 11:01 AM
5/14/2010	11:01:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2010	11:04:23 AM	Recipe started at 11:04 AM
5/14/2010	11:04:23 AM	Helium valve closed
5/14/2010	11:04:23 AM	BCl3 valve closed
5/14/2010	11:04:23 AM	PH3 valve closed
5/14/2010	11:04:23 AM	SiCl4 pre valve closed
5/14/2010	11:04:23 AM	SiCl4 post valve closed
5/14/2010	11:04:23 AM	Main Vac valve closed
5/14/2010	11:04:23 AM	Bypass valve closed
5/14/2010	11:04:23 AM	Bubbler valve closed
5/14/2010	11:04:23 AM	H2 valve opened
5/14/2010	11:04:23 AM	Helium MFC set to  0.000000
5/14/2010	11:04:23 AM	H2 MFC set to  500.000000
5/14/2010	11:04:23 AM	BCl3 MFC set to  0.000000
5/14/2010	11:04:23 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:04:23 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:04:23 AM	Tube furnace set to 0
5/14/2010	11:05:46 AM	Helium valve closed
5/14/2010	11:05:46 AM	BCl3 valve closed
5/14/2010	11:05:46 AM	PH3 valve closed
5/14/2010	11:05:46 AM	SiCl4 pre valve closed
5/14/2010	11:05:46 AM	SiCl4 post valve closed
5/14/2010	11:05:46 AM	Main Vac valve closed
5/14/2010	11:05:46 AM	Bypass valve closed
5/14/2010	11:05:46 AM	H2 valve opened
5/14/2010	11:05:46 AM	Bubbler valve opened
5/14/2010	11:05:46 AM	Helium MFC set to  0.000000
5/14/2010	11:05:46 AM	H2 MFC set to  500.000000
5/14/2010	11:05:46 AM	BCl3 MFC set to  0.000000
5/14/2010	11:05:46 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:05:46 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:05:46 AM	Tube furnace set to 1000
5/14/2010	11:25:46 AM	Helium valve closed
5/14/2010	11:25:46 AM	PH3 valve closed
5/14/2010	11:25:46 AM	Main Vac valve closed
5/14/2010	11:25:46 AM	Bypass valve closed
5/14/2010	11:25:46 AM	H2 valve opened
5/14/2010	11:25:46 AM	BCl3 valve opened
5/14/2010	11:25:46 AM	SiCl4 pre valve opened
5/14/2010	11:25:46 AM	SiCl4 post valve opened
5/14/2010	11:25:46 AM	Bubbler valve opened
5/14/2010	11:25:46 AM	Helium MFC set to  0.000000
5/14/2010	11:25:46 AM	H2 MFC set to  500.000000
5/14/2010	11:25:46 AM	BCl3 MFC set to  35.000000
5/14/2010	11:25:46 AM	SiCl4 MFC set to  400.000000
5/14/2010	11:25:46 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:25:46 AM	Tube furnace set to 1000
5/14/2010	11:40:46 AM	H2 valve closed
5/14/2010	11:40:46 AM	BCl3 valve closed
5/14/2010	11:40:46 AM	PH3 valve closed
5/14/2010	11:40:46 AM	SiCl4 pre valve closed
5/14/2010	11:40:46 AM	SiCl4 post valve closed
5/14/2010	11:40:46 AM	Main Vac valve closed
5/14/2010	11:40:46 AM	Bypass valve closed
5/14/2010	11:40:46 AM	Helium valve opened
5/14/2010	11:40:46 AM	Bubbler valve opened
5/14/2010	11:40:46 AM	Helium MFC set to  500.000000
5/14/2010	11:40:46 AM	H2 MFC set to  0.000000
5/14/2010	11:40:46 AM	BCl3 MFC set to  0.000000
5/14/2010	11:40:46 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:40:46 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:40:46 AM	Tube furnace set to 0
5/14/2010	11:56:19 AM	Helium valve closed
5/14/2010	11:56:19 AM	H2 valve closed
5/14/2010	11:56:19 AM	BCl3 valve closed
5/14/2010	11:56:19 AM	PH3 valve closed
5/14/2010	11:56:19 AM	SiCl4 pre valve closed
5/14/2010	11:56:19 AM	SiCl4 post valve closed
5/14/2010	11:56:19 AM	Main Vac valve closed
5/14/2010	11:56:19 AM	Bypass valve closed
5/14/2010	11:56:19 AM	Bubbler valve closed
5/14/2010	11:56:19 AM	Helium MFC set to  0.000000
5/14/2010	11:56:19 AM	H2 MFC set to  0.000000
5/14/2010	11:56:19 AM	BCl3 MFC set to  0.000000
5/14/2010	11:56:19 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:56:19 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:56:20 AM	Tube furnace set to 0
5/14/2010	11:56:20 AM	Run finished at 11:56 AM
5/14/2010	11:56:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	11:56:26 AM	Recipe started at 11:56 AM
5/14/2010	11:56:26 AM	H2 valve closed
5/14/2010	11:56:26 AM	BCl3 valve closed
5/14/2010	11:56:26 AM	PH3 valve closed
5/14/2010	11:56:26 AM	SiCl4 pre valve closed
5/14/2010	11:56:26 AM	SiCl4 post valve closed
5/14/2010	11:56:26 AM	Main Vac valve closed
5/14/2010	11:56:26 AM	Bypass valve closed
5/14/2010	11:56:26 AM	Bubbler valve closed
5/14/2010	11:56:26 AM	Helium valve opened
5/14/2010	11:56:26 AM	Helium MFC set to  500.000000
5/14/2010	11:56:26 AM	H2 MFC set to  0.000000
5/14/2010	11:56:26 AM	BCl3 MFC set to  0.000000
5/14/2010	11:56:26 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:56:26 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:56:26 AM	Tube furnace set to 0
5/14/2010	11:56:26 AM	Helium valve closed
5/14/2010	11:56:26 AM	H2 valve closed
5/14/2010	11:56:26 AM	BCl3 valve closed
5/14/2010	11:56:26 AM	PH3 valve closed
5/14/2010	11:56:26 AM	SiCl4 pre valve closed
5/14/2010	11:56:26 AM	SiCl4 post valve closed
5/14/2010	11:56:26 AM	Main Vac valve closed
5/14/2010	11:56:26 AM	Bypass valve closed
5/14/2010	11:56:26 AM	Bubbler valve closed
5/14/2010	11:56:26 AM	Helium MFC set to  0.000000
5/14/2010	11:56:26 AM	H2 MFC set to  0.000000
5/14/2010	11:56:26 AM	BCl3 MFC set to  0.000000
5/14/2010	11:56:26 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:56:26 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:56:26 AM	Tube furnace set to 0
5/14/2010	11:56:27 AM	Run finished at 11:56 AM
5/14/2010	11:56:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	11:57:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2010	11:58:00 AM	Recipe started at 11:58 AM
5/14/2010	11:58:00 AM	Helium valve closed
5/14/2010	11:58:00 AM	H2 valve closed
5/14/2010	11:58:00 AM	BCl3 valve closed
5/14/2010	11:58:00 AM	PH3 valve closed
5/14/2010	11:58:00 AM	SiCl4 pre valve closed
5/14/2010	11:58:00 AM	SiCl4 post valve closed
5/14/2010	11:58:00 AM	Main Vac valve closed
5/14/2010	11:58:00 AM	Bubbler valve closed
5/14/2010	11:58:00 AM	Bypass valve opened
5/14/2010	11:58:00 AM	Helium MFC set to  0.000000
5/14/2010	11:58:00 AM	H2 MFC set to  0.000000
5/14/2010	11:58:00 AM	BCl3 MFC set to  0.000000
5/14/2010	11:58:00 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:58:00 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:58:00 AM	Tube furnace set to 0
5/14/2010	11:58:44 AM	Helium valve closed
5/14/2010	11:58:44 AM	H2 valve closed
5/14/2010	11:58:44 AM	BCl3 valve closed
5/14/2010	11:58:44 AM	PH3 valve closed
5/14/2010	11:58:44 AM	SiCl4 pre valve closed
5/14/2010	11:58:44 AM	SiCl4 post valve closed
5/14/2010	11:58:44 AM	Bubbler valve closed
5/14/2010	11:58:44 AM	Main Vac valve opened
5/14/2010	11:58:44 AM	Bypass valve opened
5/14/2010	11:58:44 AM	Helium MFC set to  0.000000
5/14/2010	11:58:44 AM	H2 MFC set to  0.000000
5/14/2010	11:58:44 AM	BCl3 MFC set to  0.000000
5/14/2010	11:58:44 AM	SiCl4 MFC set to  0.000000
5/14/2010	11:58:44 AM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:58:44 AM	Tube furnace set to 0
5/14/2010	11:58:44 AM	Run finished at 11:58 AM
5/14/2010	11:58:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2010	11:35:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	11:35:53 PM	Recipe started at 11:35 PM
5/14/2010	11:35:53 PM	H2 valve closed
5/14/2010	11:35:53 PM	BCl3 valve closed
5/14/2010	11:35:53 PM	PH3 valve closed
5/14/2010	11:35:53 PM	SiCl4 pre valve closed
5/14/2010	11:35:53 PM	SiCl4 post valve closed
5/14/2010	11:35:53 PM	Main Vac valve closed
5/14/2010	11:35:53 PM	Bypass valve closed
5/14/2010	11:35:53 PM	Bubbler valve closed
5/14/2010	11:35:53 PM	Helium valve opened
5/14/2010	11:35:53 PM	Helium MFC set to  500.000000
5/14/2010	11:35:53 PM	H2 MFC set to  0.000000
5/14/2010	11:35:53 PM	BCl3 MFC set to  0.000000
5/14/2010	11:35:53 PM	SiCl4 MFC set to  0.000000
5/14/2010	11:35:53 PM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:35:53 PM	Tube furnace set to 0
5/14/2010	11:37:14 PM	Helium valve closed
5/14/2010	11:37:14 PM	H2 valve closed
5/14/2010	11:37:14 PM	BCl3 valve closed
5/14/2010	11:37:14 PM	PH3 valve closed
5/14/2010	11:37:14 PM	SiCl4 pre valve closed
5/14/2010	11:37:14 PM	SiCl4 post valve closed
5/14/2010	11:37:14 PM	Main Vac valve closed
5/14/2010	11:37:14 PM	Bypass valve closed
5/14/2010	11:37:14 PM	Bubbler valve closed
5/14/2010	11:37:14 PM	Helium MFC set to  0.000000
5/14/2010	11:37:14 PM	H2 MFC set to  0.000000
5/14/2010	11:37:14 PM	BCl3 MFC set to  0.000000
5/14/2010	11:37:14 PM	SiCl4 MFC set to  0.000000
5/14/2010	11:37:14 PM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:37:14 PM	Tube furnace set to 0
5/14/2010	11:37:14 PM	Run finished at 11:37 PM
5/14/2010	11:37:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2010	11:37:52 PM	Helium MFC set to  500.000000
5/14/2010	11:37:53 PM	Helium valve opened
5/14/2010	11:37:57 PM	Bubbler valve opened
5/14/2010	11:46:57 PM	Bubbler valve closed
5/14/2010	11:46:58 PM	Helium valve closed
5/14/2010	11:47:03 PM	Helium MFC set to  0.000000
5/14/2010	11:47:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2010	11:47:06 PM	Recipe started at 11:47 PM
5/14/2010	11:47:06 PM	Helium valve closed
5/14/2010	11:47:06 PM	H2 valve closed
5/14/2010	11:47:06 PM	BCl3 valve closed
5/14/2010	11:47:06 PM	PH3 valve closed
5/14/2010	11:47:06 PM	SiCl4 pre valve closed
5/14/2010	11:47:06 PM	SiCl4 post valve closed
5/14/2010	11:47:06 PM	Main Vac valve closed
5/14/2010	11:47:06 PM	Bubbler valve closed
5/14/2010	11:47:06 PM	Bypass valve opened
5/14/2010	11:47:06 PM	Helium MFC set to  0.000000
5/14/2010	11:47:06 PM	H2 MFC set to  0.000000
5/14/2010	11:47:06 PM	BCl3 MFC set to  0.000000
5/14/2010	11:47:06 PM	SiCl4 MFC set to  0.000000
5/14/2010	11:47:06 PM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:47:06 PM	Tube furnace set to 0
5/14/2010	11:47:39 PM	Helium valve closed
5/14/2010	11:47:39 PM	H2 valve closed
5/14/2010	11:47:39 PM	BCl3 valve closed
5/14/2010	11:47:39 PM	PH3 valve closed
5/14/2010	11:47:39 PM	SiCl4 pre valve closed
5/14/2010	11:47:39 PM	SiCl4 post valve closed
5/14/2010	11:47:39 PM	Bubbler valve closed
5/14/2010	11:47:39 PM	Main Vac valve opened
5/14/2010	11:47:39 PM	Bypass valve opened
5/14/2010	11:47:39 PM	Helium MFC set to  0.000000
5/14/2010	11:47:39 PM	H2 MFC set to  0.000000
5/14/2010	11:47:39 PM	BCl3 MFC set to  0.000000
5/14/2010	11:47:39 PM	SiCl4 MFC set to  0.000000
5/14/2010	11:47:39 PM	Bypass solenoid MFC set to  0.000000
5/14/2010	11:47:39 PM	Tube furnace set to 0
5/14/2010	11:47:39 PM	Run finished at 11:47 PM
5/14/2010	11:47:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
